Thermo Electron Corporation, a major supplier of scientific instruments,
offers tools for the characterisation of surfaces, ultra-thin films and
thin films. The product range includes Theta 300, which delivers
* Quantitative elemental analysis
* Contamination detection and quantification
* Chemical state analysis
* Layer thickness measurements
* Non-destructive depth profiles through ultra-thin films
* Sputter depth profiles through thin films.
* Full wafer maps of composition and layer thickness |