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MicroNanoSystems Profile

As the emerging technologies in the microelectronics industry have evolved so is the magazine. We have listened to our readers and the title will reflect the changing nature of the manufacturing industry and the growing opportunities for the tool and material suppliers to the industry. High volume manufacturing has to fit into legacy practices and there is a growing synergy between the emerging technologies in Micro and Nano fabrication. MicroNanoSystems will continue the tradition of education and information gathering to ensure you are in a position to make informed decisions.




 

30th March 2007

News

Product News

  • VTT and SUSS MicroTec
  • Keithley Instruments
  • Queensgate Instruments
  • Physik Instrumente
  • Supplier News


    For three days in April, you have a unique opportunity to learn from leading experts on Nanotechnology in academia and industry.

    Keithley Nano Days is a live, online conference on Nanotechnology that features a series of six web-based seminars presented by industry leaders – all at no charge. Using the Internet, you can view each of the seminars and participate in live Q&A with the presenters from the comfort of your office.
    Register to attend any of the seminars of your choice during Nano Days - each day’s registration includes two seminars covering the latest nanotechnology industry trends such as new measurement instrumentation and techniques.

    Don’t miss this great opportunity to learn industry-leading technology without ever leaving your office!

    Presenting companies include FEI Company, Hysitron, Inc., Keithley Instruments, Inc., Kleindiek Nanotechnik, Michigan State University, FCRP Center on Functional Nano Architectonics (FENA) & NRI Western Institute of Nanoelectronics (WIN).

    FREE: Download Keithley's Nanotech RSS Reader Widget from our event page that automatically keeps you updated about news in the Nanotechnology world.
    Click here for program details and to register.

    News Stories

    University of Glasgow James Watt Nanofabrication Centre officially open
    Lord Broers has officially opened the new James Watt Nanofabrication Centre at Glasgow University....28-03-2007 | Read More | back to top

    New High-k materials allow smaller, faster chips to work more efficiently
    A Recent advance by Air Products has developed 45 nanometre (nm) semiconductor chips, this has been made possible through the use of high-k materials in the gate dielectric....28-03-2007 | Read More | back to top

    Element Six participates in EC research programme into quantum information
    Element Six Ltd (E6) is taking part in a major European Commission (EC) funded project aimed at developing new technologies for quantum computing....27-03-2007 | Read More | back to top

    MEMS development centre to be equipped with new bonding system
    SUSS MicroTec announced that Infotonics has selected the SUSS ABC200 wafer bonding cluster tool and FC150 device bonder as strategic investments in their MEMS packaging lab....27-03-2007 | Read More | back to top

    SUSS and STS Launch MEMS Technology Roadshow
    SUSS MicroTec and Surface Technology Systems, two MEMS manufacturing solutions providers, have announced a based roadshow called "MEMS Technology: Embracing the Future,"....22-03-2007 | Read More | back to top

    Applied Materials to deliver Europe's first production line for manufacturing ultra-large, solar panels
    Applied Materials has been awarded a milestone contract to provide T-Solar Global S.A. of Spain with Europe's first thin film solar module production line using ultra-large 5.7m2 (2.2m x 2.6m) glass panels....22-03-2007 | Read More | back to top

    Product News Stories

    VTT and SUSS MicroTec
    NANO IMPRINTING STEPPER
    VTT and SUSS MicroTec S.A.S. have developed a versatile nano imprinting stepper. The stepper and new methods form enabling technology for fast, low-cost production of flexible solar cells and nano-scale bio analysis platforms (Lab on a Chip). The stepper was developed within the framework of the Emerging Nanopatterning Methods project. VTT is already using a prototype of the NPS300 stepper at its laboratory in Micronova in Espoo Finland.

    Based on Step and Stamp Imprint Lithography (SSIL), the stepper uses a patterned chip as a stamp; the stamp pattern is transferred to a polymer layer by imprinting. Large-scale replication of patterns is done by means of Step and Stamp imprinting. The stepper enables multi-layer imprinting with high-accuracy alignment. Both thermoplastic and UV cured material may be used. The patterned polymer layer can be used as an engraving mask when printing patterns on silicon or quartz. The method enables quick, low-cost replication of sub-100 nm geometries on a large area.

    Traditionally, nano-scale geometries have been printed using e-beam lithography. This method has one weakness: it is slow. While other microelectronics equipment and methods may be used to produce sub-100 nm line widths, such equipment is extremely highly priced. Furthermore, traditional methods are not easily adaptable for printing on new functional materials or using 3D geometries.

    E-beam lithography will continue to be used for the tiniest stamp patters also in the future. However, Step and Stamp patterning can be used for large area processes. It can also be applied to produce stamps for roll-to-roll nanopatterning.

    Suitable for new materials and 3D geometries
    The new stepper is suitable for nanopatterning of optical and electronic materials and biomaterials as well as 3-dimensional replication. VTT has even been able to produce sub-10 nm geometries. Thanks to its high-accuracy alignment, nanopatterning can be performed on the same platform with other patterning methods. The method is cost-efficient and fast, which makes it ideal for mass-scale production.

    Nanopatterning is an enabling technology, with applications such as biotechnology, photonics, nano- and polymer electronics, hard drives, sensors, etc. Micronova's cleanroom equipment and process can cover the entire process chain from stamp manufacture to characterisation. www.suss.com | back to top

    Queensgate Instruments
    Single Point NanoSensor 1100
    Queensgate Instruments' new SPNS 1100 single point capacitive nanosensor incorporates an innovative circuit design which provides exceptional performance at a fraction of the price of competitive systems.

    The control unit measures only 86 x 57 x 30mm providing a compact solution ideal for embedded applications. Suitable for measurement using any conductive target, SPNS 1100 is easily applied, comprising only the control unit, probe and optional +/- 15Vdc power supply. The sensor system allows for measurement at the nanometer level at band widths up to 35kHz.

    The system can support an extensive choice of operating ranges, so is appropriate for a wide variety of applications e.g repeatibility and vibration measurement, spindle runout measurement, straightness and flatness measurement and material thickness measurement. Enhancements for release in 2007 include options for combining modules and channels - plus a variety of accessories and probes. Users will be able to deploy parallel plate capacitors and single point nanosensors in tandem.

    www.nanopositioning.com | back to top

    Keithley Instruments
    Pulse I-V Capabilities for Advanced Semiconductor Device Testing
    Keithley Instruments, Inc. announces the newest release of hardware and software advances for its award-winning Model 4200-SCS Semiconductor Characterization System, representing the next step in pulse test offerings for the Model 4200-SCS. The lab-based system incorporates tightly integrated DC and pulse measurement capabilities with complete application packages for turn-key solutions. An enhanced pulse generator card and a new scope card offer powerful new capabilities to researchers working on cutting-edge semiconductor research and production. Significant enhancements to Keithley’s award-winning Model 4200-PIV package and two new application solutions extend the Model 4200-SCS’s versatile DC and pulse hardware and software into new areas such as Flash memory testing, high-power RF device testing, and pulse testing for advanced semiconductor materials. To learn more, visit http://www.keithley.com/pr/069.

    Enhanced Test Hardware
    Keithley’s new solution features significant hardware enhancements. A new pulse generator card, the Model 4205-PG2, offers several new capabilities such as a patent-pending Segment ARB™ mode that lets users easily generate complex waveforms using simple line segments. The Segment ARB capability allows building of complex waveforms beyond those available through basic pulsing. This capability is essential for testing of Flash memory, which requires complex wave patterns for characterization and lifetime testing of memory cells. The Model 4205-PG2 also comes with an arbitrary waveform generator, or ARB mode, and
    features a built-in High Endurance Output Relay with almost unlimited lifetime. The relay is easy to control and eliminates external relays used in Flash testing, significantly shortening endurance testing.

    In addition, a new power supply significantly expands the possible configurations of Model 4200-SCS systems. Now, a Model 4200-SCS chassis allows up to four separate pulse generator cards per chassis. With each Model 4205-PG2 having two channels, a Model 4200-SCS test system can have up to eight pulse channels per chassis. In addition, the integrated Model 4205-PG2 has a trigger-in signal for an external trigger source, so multiple pulse cards in one chassis can be synchronized to within 10nsec of one another. Click here to read more.

    www.keithley.com | back to top

    Vogelsberger supplies growing demand for Quartzware
    As other suppliers’ Quartzware delivery times extend, Vogelsberger Quarzglastechnik is ramping up production in its 3 factories in Germany.

    Already a qualified supplier to many key players in the industry, the satisfied customer base for this ISO 9001:2000 certified company is growing fast.

    Using Heraeus and GE material and all the necessary in house technology:

    • CNC-processing
    • laser cutting
    • jet cutting
    • hydrogen welding
    Vogelsberger is making horizontal and vertical process tubes up to 8” technology, as well as carriers, pedestals, injectors, and other accessories for furnace equipment. They are also providing second source parts for wet etch, RTP and other single wafer processing equipment.

    For enquiries in the UK & Ireland, contact: office@west.eu.com
    For the rest of the world, contact: info@ce-mat.com

    www.west.eu.com | back to top

    Physik Instrumente
    Compact XY Nanopositioning Tables For Nanometrology Applications
    (Physik Instrumente) L.P., offers the P-621.2CD family of very compact XY nanopositioning tables. These precision flexure-guided systems can be used for scanning and static positioning and provide travel ranges of 50x50 to 1000 x100 µm .

    Typical Applications
    Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry, , Nanopositioning, Quality Assurance, Semiconductor Technology

    Controllers: High Speed, Digital Control
    A variety of ultra-low-noise 32-bit digital controllers provide fast communications and come with a wide selection of software tools.

    Smaller than a Credit Card, Very Stiff Design and Travel Ranges to 1000 µm
    The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy. Trajectory precision is in the low-nanometer range. High acceleration forces are provided by multiple, newly-developed high-force multilayer piezoelectric linear actuators.

    Features & Advantages
    - 50x50 to 1000 x 1000 µm XY-Travel
    - Closed-Loop Digital Control for Up to 99.98 % Position Accuracy
    - Vacuum-Compatible
    - Stiff and Compact Design for High Resonant Frequencies and Easy Integration
    - Resolution <1 nm
    - Frictionless, Maintenance-Free Precision Flexure Guiding System
    - Ceramic-Encapsulated Piezo Drives for Humidity Protection
    - Capacitive Direct-Metrology Sensors for Faster Servo Response

    Maintenance-Free, No Wear & Tear
    Because flexure-guides, piezoelectric actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability. The integrated multilayer piezo drives are protected against humidity by a patented ceramic-encapsulation.

    Higher Linearity Through Direct-Motion Metrology with Capacitive Sensors
    The stages are equipped with non-contact capacitive-sensors and provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.

    www.pi.ws | back to top

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