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MicroNanoSystems Profile

As the emerging technologies in the microelectronics industry have evolved so is the magazine. We have listened to our readers and the title will reflect the changing nature of the manufacturing industry and the growing opportunities for the tool and material suppliers to the industry. High volume manufacturing has to fit into legacy practices and there is a growing synergy between the emerging technologies in Micro and Nano fabrication. MicroNanoSystems will continue the tradition of education and information gathering to ensure you are in a position to make informed decisions.




 

8th June 2007

News

  • New microfabrication facility opened for R&D in optoelectronic semiconductors
  • French industrial gases company seals deal on emerging Russian semi market
  • Hawaii to host new solar photovoltaic farm in alternative energy project
  • Big boost for industry of the small - nanotech
  • Collaboration to focus on advanced direct write e-beam nano-EPC solutions
  • Japanese research centre will collaborate on tachyon-based workflow
  • Product News

  • MEMS flow sensors (New)
  • Ultrasonic Acoustic Sensor
  • Nanomaterial Fabrication Tool (New)
  • Linear Positioning Stages

  • News Stories

    New microfabrication facility opened for R&D in optoelectronic semiconductors
    Advanced Photonix, Inc has announced the completion of the company's new multi-million dollar, 5,000 square foot microfabrication facility for R&D and manufacturing of optoelectronic semiconductors....07-06-2007 | Read More | back to top

    French industrial gases company seals the deal on emerging Russian semi market
    Air Liquide has just signed two agreements with major Russian semiconductor manufacturing company, Mikron....06-06-2007 | Read More | back to top

    Hawaii to host new solar photovoltaic farm in alternative energy project
    Castle & Cooke, Inc. has announced that it has signed a contract through its subsidiary, Lana`i Sustainability Research, LLC, to build the largest solar photovoltaic farm in Hawai`i and the fourth largest in the United States....06-06-2007 | Read More | back to top

    Big boost for industry of the small - nanotech
    Australia's nanotechnology industry is set to expand with the establishment of the $21.5 million National Nanotechnology Strategy, announced by Prime Minister John Howard and Industry Minister Ian Macfarlane as part of the Industry Statement....04-06-2007 | Read More | back to top

    Collaboration to focus on advanced direct write e-beam nano-EPC solutions
    GenISys has announced that it has formed a technology development partnership with JEOL, and Cornell University’s Nanoscale Science and Technology Facility....04-06-2007 | Read More | back to top

    Japanese research centre will collaborate on tachyon-based workflow
    Brion Technologies in collaboration with Japan's Semiconductor Technology Academic Research Centre (STARC) will work to develop and test a complete design-for-manufacturing (DFM) workflow....24-05-2007 | Read More | back to top

    Product News Stories

    MEMS flow sensors (New)

    Omron Electronic Components

    Omron Electronic Components have developed the D6F-W and D6F-V series of MEMS flow sensors, which have the ability to measure air velocity and volume. The D6F-W01A1 measures a flow range of 0 to 1 m/s and the D6F-W04A1 a range of 0 to 4 m/s. Both exhibit a ±5% full-scale repeatable accuracy, while the D6F-V measures a flow range of 0 to 3 m/s with a ±10% full-scale repeatable accuracy. Both versions are offered as a standard product and arrive calibrated per factory specifications.

    To enable the sensors to perform in a dust-filled environment, a dust-resistant design prevents both contamination of the sensor chip and build-up of dust, which would restrict the flow path and impair the accuracy of measurement. Most particulates cannot pass through the sensing area and are discharged through the exhaust route.

    A clogged filter-detection sensor monitors the pressure drop over the filter and emits a warning signal indicating the need for filter replacement when the drop exceeds a given threshold. This patented dust segregation system (DSS) is over 99% efficient in a variety of applications.

    The D6F-W series operates on a supply voltage of 10.8 to 26.4 Vdc while consuming 15 mA maximum. Their output signal is 1 to 5 Vdc (non-linear) with load resistance of 10 kΩ minimum.

    The 9 x 20 x 39-mm case is composed of molded thermoplastic and connection is made through a three-pin connector. The D6F-W operates from -10 to 60°C with no ice or condensation. The D6F-V series operates on a supply voltage of 3.15 to 3.45 Vdc while consuming 15 mA maximum. Their output signal is analog 0.5 to 2 Vdc (non-linear) with load resistance of 10 kO minimum. The 8 x 13 x 24-mm case is composed of molded thermoplastic and connection is made through a three-pin connector. The D6F-W operates from -10 to +60C with no ice or condensation.

    www.components.omron.com | back to top

    Ultrasonic Acoustic Sensor

    Knowles Acoustics

    Knowles Acoustics have introduced an Ultrasonic Acoustic Sensor (UAS) for use as a component to detect/receive ultrasonic sound in air. The Ultrasonic Acoustic Sensor utilises the latest technology in MEMS to provide a robust mechanical acoustic sensor which performs over a wide environmental range. Sampling and low volume production is being offered now with mass production available beginning of Q2 2007. Pricing is comparative to current piezo ultrasonic receiving sensors on the market.

    Compared to conventional ultrasonic sensors that have a narrow frequency band of detection, the Knowles Sensor is for capturing a wide frequency range applicable to a variety of ultrasonic applications:

    • Ultrasonic Range Detection
    • Condition Monitoring
    • Fault detection
    • Level & Position Sensing

    The sensor can be utilised to monitor and detect frequencies from 10 kHz to 65 kHz with minimal attenuation across the frequency range.

    The Ultrasonic Sensor is a receiving element that enables the ability to detect multiple frequencies within a single sensing element. Thus, reducing or eliminating the guesswork for customer on identifying the appropriate sensor for the frequency needing to be detected or monitored,? said Angelo Assimakopoulos, Director of New Business Development for Knowles Acoustics.

    The Sensors miniaturised surface mountable package design also makes it adaptable to utilise in most finished goods as well as industrial products.

    www.knowlesacoustics.com | back to top

    Nanomaterial Fabrication Tool (New)

    Surrey NanoSystems

    NanoGrowth 1000n, is a tool, purpose-designed for nanomaterial fabrication and comes with both CVD (chemical vapour deposition) and PECVD (plasma-enhanced CVD) processing capability.

    Included is a ultra-high purity gas delivery system and flexible closed-loop control system that allow users to define target tolerances to achieve a high level of repeatability during all phases of the process.

    A very high degree of hardware modularity allows the tool to be expanded easily and configured to meet current and future fabrication requirements.

    Options are: further processing techniques such as ICP (inductively coupled plasma), dual sputter sources for catalyst deposition - including a module for delivery of vapour-phase catalysts like ferrocene - plus modules to add process stages for automated pilot production or high throughput. Included in the latter category are an automated wafer transport load/lock system, integrated etching capability, and a PECVD module for deposition of thin-film silicon-based materials.

    Users are provided with ready-to-use fabrication programs. These provide nanomaterial growth 'recipes' in the form of software templates that may be adapted easily by users for their own applications.

    Surrey NanoSystems' new carbon nanotube tool is controlled by touch-screen SCADA-style software (supervisory control and data acquisition)- developed and refined over more than seven years on high-end thin-film deposition tools. MIMIC displays of the tool and other graphical techniques provide simple control over all phases of the material growth process, allowing the user to control every aspect - such as gas flow rate, temperatures, RF power, etc - manually or automatically.

    www.surreynanosystems.com | back to top

    Linear Positioning Stages

    Aerotech Ltd

    Aerotech have announced its new ATS115 and ATS165 low-cost positioning stages featuring linear motion guide bearings, precision ball screws and durable hard cover/side-seal protection for high performance, medium precision positioning applications. The servo motor driven stages have nominal widths of 115 mm or 165 mm, a choice of travel range from 50 mm to 600 mm and a low-profile height of just 60 mm. They are suited for long and trouble-free use in medium duty manufacturing production and research automation where =45 kg direct loading, 300 mm/sec speed and bidirectional repeatability above +/- 1.0 µm per-axis is required.

    The ATS115 is Aerotech’s smallest side-sealed, hard cover positioning stage and is based upon a tried and tested protection system designed for hostile application areas such as laser welding and ultrasonic machining. Unlike traditional bellows or sliding top-seal designs, the one-piece hard cover and vertical side-seal arrangement completely protects and naturally deflects debris away from the internal stage mechanics.

    With improved protection, Aerotech say that working life is extended, downtime and maintenance schedules are drastically reduced and production time maximised. The design can include optional brush cleaning strips, fitted to the moving carriage, to help remove machining waste and prevent debris from accumulating on the hard cover.

    As standard, ATS115 and ATS165 linear stages are fitted with Aerotech’s BMS series cog-free, brushless motors with 2500-line rotary encoders for 0.5 µm resolution with excellent smoothness and acceleration performance. Motor mounting is made through a NEMA 23 flange and alternative motors from Aerotech or third party suppliers include stepper motors or brushed servo motors to allow the widest choice of price and performance alternatives. A side motor mounting option is also available to reduce overall stage length for restricted space applications.

    The wider ATS165 shares a similar protection, bearing and drive design with the increased width allowing a heavier payload and offset loading capability over the ATS115. Common interfacing dimensions allow both ranges to be assembled for optimal X-Y and X-Y-Z mounting configuration. A mounting bracket is available to support vertical orientation where a brake option can be provided to prevent back-driving. A complete selection of mounting configurations is available both with and without precision orthogonality alignment. Both stage designs are available in a wide choice of travel ranges covering 50 mm, 100 mm, 150 mm, 200 mm, 250 mm, 300mm, 400mm, 500mm and 600 mm. An optional table top is available with a useful array of holes for mounting customer fixtures or with mounting holes to suit a choice of Aerotech rotary stages. As with all Aerotech mechanical stages, the ATS115 and ATS165 can be supplied complete with accuracy and repeatability performance plots.

    ATS115 and ATS165 stages are typically supplied as part of complete “ready to run” systems configured to the customers requirements with Aerotech motion controllers and servo amplifiers. A wide choice of motion controllers available includes the A3200 Automation Platform – a PC based, software only motion and machine control system with deterministic Firewire networking; the Soloist standalone single axis intelligent drive; or the Ensemble range of intelligent drives with deterministic Ethernet for tightly synchronised multi­­-axis motion and I/O control. Aerotech systems are supplied complete with interconnecting cables, motor parameter set-up data, performance documents and assembly information to speed commissioning and help integrators with their own system documentation.

    For technical information, please contact Dr Cliff Joliffe: Email: cjolliffe@aerotech.co.uk

    www.aerotech.com | back to top

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